阀体、阀板:不锈钢
密封件:氟橡胶、波纹管(轴封)、丁腈橡胶。
CCD型电动超高真空插板阀是通过电动装置驱动阀杆带动阀板作上下运动,达到阀门的开启或关闭。阀门用于接通或切断真空管路中的气流。适用介质为纯净空气和非腐蚀性气体。
带反馈信号装置。
适用范围:Applicability | 105~1.3×10-7Pa |
阀门漏率:Valve Leak Rate | ≤1.3×10-7Pa.L/S.(DN≤200) ≤6.7×10-7Pa.L/S.(DN≥250) |
适用温度:Applicable Temperature | -30~+150℃ |
阀门开启时阀板两侧的压差: The differential pressure between the two sides of valve disc upon valve opening: |
≤2.7×103Pa. |
电源:Valve of power | 220V/50Hz |