Pα-HH气体减压器,主要适用于高压输出,BA级,适用于半导体高纯气体。(常用作氮气吹扫用)
产品特点:
膜片结构,调节顺畅
单级式减压
出口也可选择调节阀
内置过滤器,保证高洁净
超纯水清洗
外漏率低于:1×10-9Pa.M3/Sec.He,内漏率低于:1×10-10Pa.M3/Sec.He
使用温度:-10~70℃
Feature highlight:
Diaphragm type, adjusted smoothly
Single stage pressure regulator
Optional diaphragm valve available
Filter fitted at inlet ensuring high level cleaning
Pure water washing for all parts
Outlet leakage: 1×10-9Pa.M3/Sec.He,Inner leakage: 1×10-10Pa.M3/Sec.He
Use temperature: -10~70℃
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